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Vacuum processing apparatus

US-7879149-B2

Abstract

The vacuum processing apparatus includes a vacuum chamber, a vacuum pump, and a pipe 30 connecting the vacuum chamber to the vacuum pump to evacuate the vacuum chamber. A flexible pipe is included as a part of the pipe, and a mechanism for fixing the flexible pipe so as not to shrink at the time of evacuation. The mechanism includes a bar for fixing the vacuum pump side of the flexible pipe to a floor. In an embodiment, the vacuum processing apparatus is a substrate bonding apparatus for fabricating a display device.

Patent figures（8）

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Source status & events

No source-status events are recorded.

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