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Gas barrier film, substrate film, and organic electroluminescence device

US-7815981-B2

Abstract

A gas barrier film comprising a gas barrier laminate on a substrate film, wherein the gas barrier laminate comprises at least one three-layer unit consisting of a silicon nitride layer, a silicon oxynitride layer adjacent to the silicon nitride layer, and a silicon nitride layer adjacent to the silicon oxynitride layer. The gas barrier film has excellent transparency and gas barrier property.

Patent figures（6）

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