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Method of producing liquid crystal display devices

US-7407559-B2

Abstract

A method of producing a liquid crystal display device. A first substrate having a liquid crystal dripped thereon, and a second substrate, are arranged in a vacuum chamber. The first substrate is held by a first electrostatic chuck and the second substrate is held by a second electrostatic chuck. The second substrate is urged onto the first substrate to bond the first substrate and the second substrate together. The bonded first and second substrates are then peeled off from the electrostatic chucks. A resin sheet is arranged on the second electrostatic chuck, so that the bonded first and second substrates do not cling to the second electrostatic chuck when peeled off.

Patent figures（8）

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