用于精确调节激光加工设备的光轴，提高加工精度。
专利摘要
一种在加工位置和形状方面精度优异的激光加工设备，设有光轴调节单元，其布置在从激光振荡器输出的激光束的基础光轴上，以将从激光振荡器输出的激光束调节到工件上。该激光加工设备还设有反射镜，布置在激光振荡器和光轴调节单元之间，用于自由偏转激光束的光轴。该激光加工设备还包括光轴位置检测装置，布置在光轴调节单元和光轴偏转装置之间，用于检测激光束的光轴位置。该设备基于光轴位置检测装置的检测结果，通过反射镜将入射到光轴调节单元的激光束的光轴与基础光轴对准。
Original abstractA laser machining apparatus that excels in precision in terms of machining position and shape is provided with an optical axis adjusting unit disposed on a basal optical axis of a laser beam outputted from a laser oscillator so as to adjust the laser beam outputted from the laser oscillator onto a workpiece. The laser machining apparatus is provided further with mirrors, disposed between the laser oscillator and the optical axis adjusting unit, for freely deflecting the optical axis of the laser beam. The laser machining apparatus also includes an optical axis position detecting means, disposed between the optical axis adjusting unit and the optical axis deflecting means, for detecting the position of the optical axis of the laser beam. The apparatus aligns the optical axis of the laser beam incident on the optical axis adjusting unit with the basal optical axis by means of the mirrors based on a result detected by the optical axis position detecting means.
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